Variable response of a thermally tuned MEMS pressure sensor
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Sensors and Actuators A: Physical
سال: 2016
ISSN: 0924-4247
DOI: 10.1016/j.sna.2016.05.018